SETCAS SC-PE-I Plasma Cleaner Plasma cleaning machine
SC-PE-I
Compact Plasma Cleaner
(13.56 MHz RF)
Efficient, Consistent RF Plasma Generation in a Portable Design.
The SC-PE-I Plasma Cleaner is a compact, high-performance instrument designed for laboratory precision. Operating at a standard 13.56 MHz frequency with adjustable RF power up to 50W (High/Mid/Low settings), it ensures efficient plasma generation for surface cleaning and modification.
Its ultra-lightweight design (only 6kg) and compact dimensions allow it to fit easily on any desktop, making it perfect for quick, hassle-free installation. The system supports optional advanced accessories like precision flow meters and pressure gauges for exact process control, as well as external vacuum pumps, making it an ideal solution for diverse material science and semiconductor applications.
Technical Specifications
Detailed technical parameters.
| RF & Chamber Parameters | |
|---|---|
| Operating Frequency | 13.56 MHz (Standard RF) |
| Maximum RF Power | 50 W (Adjustable High / Middle / Low levels) |
| Quartz Chamber Size | Diameter: 74 mm; Depth: 185 mm |
| Physical Dimensions | |
| Machine Dimension | 220 mm (H) × 254 mm (W) × 205 mm (D) |
| Machine Weight | 6 kg |
| Installation Method | Horizontal desktop placement |
| Optional Accessories | |
| Flow Meter | Precision flow meter (0–160 mL/min) |
| Pressure Gauge | 0 Pa – Atmospheric pressure |
| Mechanical Vacuum Pump | 3L Capacity |
| Operating Environment | |
| Ambient Temperature | 0–40 °C |
| Relative Humidity | < 85% (Non-condensing) |
| Warranty | 1 Year |
CE Declaration
Verified by Shenzhen Shuofeng Testing
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