SETCAS KW-4Q Spin Coater Factory direct sales Including vacuum pump and chucks
KW-4Q / KW-4Q-I
12-Inch Spin Coater
for High Volume
High-Volume Precision for 8-12 Inch Wafers.
Elevate high-volume, precision spin coating with our advanced instrument—designed for 12-inch silicon wafer processing and engineered for efficiency, versatility, and reliable performance!
Equipped with dual automatic swing arms, it supports 4-channel glue coating and developing, plus 2-way EBR (edge bead removal) for front and back edge cleaning—ensuring uniform, high-quality films. The instrument delivers powerful performance with a maximum speed of 6000 rpm and continuously adjustable acceleration (10-1000 RPM/S), adapting to diverse process requirements.
Stay connected and in control: built-in Bluetooth and standard 485 Modbus communication enable seamless connectivity, paired with free PC control software for intuitive remote operation and process management. Perfect for demanding semiconductor and lab applications, this instrument combines professional-grade features with user-centric design.
Choose Your Model
Select the configuration that best fits your experimental needs.
KW-4Q
Standard 12-Inch Version- Substrate Size: 200-300mm (8-12 inches).
- Speed Range: 10 - 6000 rpm.
- Interface: 8-inch touch screen.
- Connectivity: USB / RS485 / Bluetooth.
- Rotation: Forward and reverse supported.
KW-4Q-I
With Auto Dispensing & EBR- All features of KW-4Q, PLUS:
- De-edging (EBR): 2-way EBR (front & back edge removal).
- Auto Dispensing: Dual automatic swing arms.
- 4-Channel: Supports 4-channel gluing & developing.
- Advanced Control: Optimized for high-volume uniformity.
Technical Specifications
Detailed comparison of technical parameters.
| Coating & Rotation Performance | |
|---|---|
| Substrate Size | 200-300mm (8 inches to 12 inches) |
| Speed Range | 10 – 6000 rpm |
| Acceleration Range | 10 – 1000 rpm/s (Adjustable) |
| De-edging Function | 2-way EBR (front & back edge removal supported) |
| Auto Glue Dispensing | Dual automatic swing arms; supports 4-channel gluing & developing |
| Motor Speed Stability | ±1 rpm |
| Spin Coating Uniformity | ±1% |
| Control & Interface | |
| Human Machine Interface | 8-inch touch screen |
| Communication Interface | USB (std) / RS485 (opt) / Bluetooth (standard) |
| Set Data | Unlimited groups, 15 speeds per group; Continuous speed adjustment |
| Cycle Duration | 0 - 10,000s |
| Data Protection | Default with power-down protection |
| Electrical & Physical | |
| Op. Voltage (Spin Coater) | AC 100–250 V, single phase, 50/60 Hz |
| Op. Voltage (Pump) | AC 220V (Standard); AC 110V (Optional) |
| Spin Coater Power | 2 kW |
| Pump Power | 350W |
| Dimensions (Spin Coater) | 550 mm (W) × 550 mm (D) × 350 mm (H) |
| Weight | Spin Coater: 50kg | Pump: 9kg |
| Warranty | 1 Year |
| Performance & Control | |
|---|---|
| Substrate Size | 200-300mm (8 inches to 12 inches) |
| Speed Range | 10 – 6000 rpm |
| Acceleration Range | 10-1000 rpm/s (Adjustable) |
| Interface | 8-inch touch screen |
| Communication Interface | USB (std) / RS485 (opt) / Bluetooth (std) |
| Data & Operation | |
| Set Data | Unlimited groups, 15 speeds per group (standard) |
| Cycle Duration | 0-10,000s |
| Hardware & Power | |
| Operating Voltage | AC 100-250V, single phase, 50/60Hz |
| Spin Coater Power | 2 kW |
| Dimensions & Weight | 550x550x350mm | 50kg (Coater), 9kg (Pump) |
| Vacuum Pump | SC-550V (Power: 350W, Speed: ≥60L/min) |
| Oil-free Vacuum Pump Parameters | |
|---|---|
| Voltage | Standard 220VAC, 50Hz; Optional 110VAC, 60Hz |
| Power | 350W (Standard for SC-550V) |
| Pumping Speed | ≥60 L/min |
| Max Vacuum | -85 kPa |
| Noise Level | ≤55 dB |
CE Declaration
Verified by Shenzhen Shuofeng Testing
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