SETCAS UV-Ozone Cleaner with heating control function Factory direct sales and free shipping
SC-UV-I
Full Range UV-Ozone
Surface Cleaner
From Lab to Industry: Atomic-Level Cleaning & Activation.
The SC-UV Series UV-Ozone Cleaner is a dry, fine cleaning instrument designed to ensure superior film quality by cleaning various single-crystal substrates. It effectively removes photoresist, improves surface wettability, cleans SEM/TEM samples, and activates polymer surfaces.
This system provides an acid-free, non-damaging, atomic-level cleaning method ideal for eliminating organic compounds. It utilizes a powerful combination of two UV wavelengths: 185nm (which converts oxygen into ozone) and 254nm (which breaks chemical bonds, specifically C-C bonds). This synergistic effect ensures thorough decomposition of organic contaminants.
Our complete lineup ranges from the standard SC-UV-I for small substrates, to the intelligent touchscreen SC-UV-I++ with motorized lift, up to the industrial-grade SC-UV-III for massive 760mm substrates.
Choose Your Model
Select the configuration that best fits your experimental needs.
SC-UV-I / I+
Standard Compact Version- Area: 150mm × 200mm.
- Structure: Drawer type sample stage.
- Heating (I+): Optional heating up to 200°C.
- Power: 150W (Dual Wave Tube).
- Best for: Small lab samples & basic research.
SC-UV-II / II+
Medium Size Enhanced- Area: Large 300mm × 300mm area.
- Heating (II+): Optional heating up to 200°C.
- Power: 300W High Power (Dual Tube x2).
- Distance: Adjustable 5~60mm.
- Best for: 12-inch wafers or multiple samples.
SC-UV-I++
Touchscreen & Motorized- Area: 210mm × 210mm.
- Control: 7-inch Retina Touchscreen.
- Structure: Top-opening lid & Motorized Lift Tray.
- Heating: RT to 200°C (Standard).
- Best for: Precision control & ease of use.
SC-UV-III
Industrial Extra Large- Area: Massive 760mm × 760mm.
- Power: Extreme 1000W Power.
- Heating: RT to 200°C.
- Structure: Heavy-duty drawer style (250kg weight).
- Best for: Industrial mass production.
Technical Specifications
Detailed comparison of technical parameters.
| Parameters | SC-UV-I / I+ | SC-UV-II / II+ | SC-UV-I++ (Smart) | SC-UV-III (Industrial) |
|---|---|---|---|---|
| Wavelength | 185nm & 254nm (Dual Wavelength) | |||
| Light Intensity | 28~32 mW/cm² | 28~32 mW/cm² | 28~32 mW/cm² | 28~32 mW/cm² |
| Lamp Power | 150W | 300W | 150W | 1000W |
| Irradiation Area | 150 × 200 mm | 300 × 300 mm | 210 × 210 mm | 760 × 760 mm |
| Adjustable Dist. | 5 ~ 30 mm | 5 ~ 60 mm | 0 ~ 30 mm (Motorized) | 0 ~ 20 mm |
| Tray Dimensions | 160 × 200 × 30 mm | 300 × 300 × 100 mm | 210 × 210 × 30 mm | 760 × 760 mm |
| Timer Range | 0~99 min 99s | 0~99 min 99s | 0~99 min 99s | 0~99 min 99s |
| Control Interface | Digital Buttons | Digital Buttons | 7-inch Touchscreen | Digital Buttons |
| Heating Range | RT - 200°C (I+ only) | RT - 200°C (II+ only) | RT - 200°C (Standard) | RT - 200°C |
| Structure Style | Drawer Type | Drawer Type | Top-Opening Lid | Drawer Type |
| Material | Stainless steel construction (Acid/Alkali resistant & Corrosion proof) | |||
| Air Inlet/Outlet | In:φ8mm / Out:φ25mm | In:φ8mm / Out:φ50mm | In:φ8mm / Out:φ25mm | In:φ8mm / Out:φ50mm |
| Dimensions (mm) | 250(W)×300(D)×260(H) | 380(W)×430(D)×320(H) | 550(W)×450(D)×350(H) | 930(L)×905(W)×685(H) |
| Net Weight | 8 KG | 26 KG | 25 KG | 250 KG |
| Warranty | 1 Year | 1 Year | 1 Year | 1 Year |
| Environment | Temp: 0-40°C / Humidity: < 85% | |||
CE Declaration
Verified by Shenzhen Shuofeng Testing
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