Accessories: Oil-free vacuum pump Chucks Disposable glue pot Center alignment tool Speed meter

Accessories Name

Picture

Index

Oil-free Vacuum Pump
   (for Spin Coater KW Serial)

1.Serial number:AP-550V
2.Pumping speed:1.5L/s
3.Power：320W
4.Noise：5`8db
5.Voltage：220V/50Hz
6.Min vacuum：-700mmHg
7.Weight：5.8KG
8.Dimensi9on：240mm（L）×130mm（W）×200mm（H）

Silicon Wafer

 N type double-sided polishing 500um

Glass slide

1″X 3″inch，Thick 1-1.2mm

Chucks/Tray (for Spin Coater)

 5-100mm

Center Alignment Tool

Suitable standard 1”,2”,3”,4” wafer

O Ring Holder

Support 10-25mm film adsorption, can prevent glue from entering

Disposable Glue Pot

180mm diameter and 240mm diameter, a set of ten liners